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3-5064-01 Mass Flow Controller 10SCCM-Air C1005
model:
3-5064-01
category:
toner
Product Description
Product Model: 3-5064-01 Features Thermal flow sensors […]
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Product Details
Product Model: 3-5064-01
Features
- Thermal flow sensors are less sensitive to external temperature.
- Suppresses the flow surge phenomenon at the start.
Spec
- Model number: C1005
- Full scale flow rate - gas type: 10SCCM-Air
- Gas type: Air
- Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 - 35℃)
- Responsiveness: 6sec
- Flow rate control range: 5 - 100% FS
- Input and output: Analog signal (0 - 5VDC)
- Valve type: N/O normal open
- Reproducibility: +/- 0.2% FS
- Operation pressure range: 50 - 300kPa
- Pressure resistance: 1MPa (G)
- External leak rate: 1 x 10 - 7Pa, m3/sec (He) or less
- Gas contact unit material: Stainless Steel (SUS316), PTFE, Fluorine rubber
- Connection: Equivalent to 1/4in.SWL
- Power supply: + 15VDC +/- 5% 60mA, - 15VDC +/- 5% 150mA
- Communication system: Analog 0 - 5VDC (D-Sub9Pin connector)
- Size: 127 x 25.5 x 100mm
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