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3-753-01 XY Table Mechanism Connector TSL-70
Product Description
Product Model: 3-753-01Product Brand: IRIE KOKEN Spec C […]
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Product Details
Product Model: 3-753-01
Product Brand: IRIE KOKEN
Spec
- Connecting flange: CF 70 FH-CF 70 FT
- Operating range: XY/± 5mm, Angle/0 to 5 °(only with angle adjustment)
- Drive system: Manual
- Working pressure range: High vacuum (1 x 10 ^ -6 Pa) to atmospheric pressure
- Helium leakage amount: 1.0 x 10 ^ -9 Pa ・ m3/s
- Baking temperature: 150 °C or less
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