Features

• A diaphragm valve that can *** a high-purity liquid material such as TEOS ***d in semiconductors and liquid crystal devices as a fluid.
• It is now possible for the ***r to replace the seat (ASSY) part while maintaining the basic characteristics of the valve, particle performance and purge characteristics.
• Effective for improving maintenance performance and reducing running costs for sealing valves for material containers that require regular cleaning.
• The seat (ASSY) section replacement jig is the same as the WD4 manual valve series.
• Actuator diameter φ39.7 mm and line pitch 40 mm can be accommodated.