Analyzer, Testing Equipment
61-6985-51 ［Discontinued］Built-In Glass Scale Automated Stage System 60 x 60mm TSDMGS60-15X
Product Description
Product Model: 61-6985-51Product Brand: SIGMAKOKI CO., […]
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Product Details
Product Model: 61-6985-51
Product Brand: SIGMAKOKI CO., LTD.
Features
- This is a full closed loop control system that ***s a dedicated controller to control an automatic stage with a small high-resolution linear encoder.
- The feedback of the linear encoder signal and the microstep drive minimize the lead error characteristic of the feed screw mechanism.
- By adopting a glass scale with a small linear expansion coefficient, you can achieve a reliable positioning system that is stable against fluctuations in the surrounding environment.
- It is ideal for applications that require accurate positioning at submicron or for long drive applications where reproducibility is affected by temperature drift.
Spec
-
[
Common specification]
- Motor type: 5 phase stepping motor 0.35A/phase (Oriental Motor (Co., Ltd))
- Motor product number: PK513PB-C9 (□20mm)
- Motor step angle: 0.72°
- Compatible controller: SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
- [Individual specification]
- Movement amount: 15mm
- Table surface size: 60 x 60mm
- Feed crew: Precision grinding screw φ5mm, Lead 0.5mm
- Movement guide: Ball guide
- Stage material: Iron
- Mass: 0.8kg
- Resolution (full): 1μm/pulse
- Resolution (half): 0.5μm/Pulse
- Max speed: 5mm/sec
- Positioning accuracy: 5μm
- Repeatable positioning accuracy: 0.5μm
- Withstand load: 19.6N (2.0kgf)
- Moment rigidity/pitch: 0.4″/N・cm
- Moment rigidity/yaw: 0.4″/N・cm
- Moment rigidity/roll: 0.4″/N・cm
- Lost motion: 0.5μm
- Backlash: 10μm
- Parallelism: 50μm
- Parallelism of motion: 10μm
- Verticality of motion: ?
- Pitching: 15″
- Yawing: 15″
- Sensor product number: GP1S092HCPI (Sharp Corporation)
- Limit sensors: Is available (NORMAL CLOSE)
- Origin sensor: No
- Proximity origin sensor: No
- RoHS conform product
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