61-6983-54 Built-In Compact Scale Automated Stage 100 x 100mm OSMS(CS)26-100(X) OSMSCS26-100X
Analyzer, Testing Equipment

61-6983-54 Built-In Compact Scale Automated Stage 100 x 100mm OSMS(CS)26-100(X) OSMSCS26-100X

model: 61-6983-54
brand: SIGMAKOKI CO., LTD.

Product Description

Product Model: 61-6983-54Product Brand: SIGMAKOKI CO., […]

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Product Details

Product Model: 61-6983-54
Product Brand: SIGMAKOKI CO., LTD.

Features

  • By using dedicated stage controllers (SHOT-302 GS/304 GS, HIT-M, HIT-S), a highly accurate and reliable full closed loop system can be realized.
  • Structures resistant to moment and combined loads are less susceptible to pitching, rolling, and yawing, and can be positioned with high rigidity and accuracy.
  • Although a compact scale is built in, the installation space does not change from the OSMS series when the same amount of movement is ***d.

Spec

  • [

    Common specification]
  • Motor type: 5 phase stepping motor 0.75A/phase (Oriental Motor (Co., Ltd))
  • Motor product number: PK525HPB-C4 (□28mm)
  • Motor step angle: 0.72°
  • Sensor power voltage: DC5 - 24V±10%
  • Sensor power consumption: 80mA or less (20mA or less per 1 sensor)
  • Sensor control output: NPN open collector output DC 30V or less 50mA or less
  • Sensor output logic: When shading: Output transistor OFF (non-conducting)
  • Power voltage/Consumption current: DC5V±5% / 50mA
  • Drive cable: D15D15A-CA
  • Scale cable: GSEF-CA-3
  • Compatible driver: -
  • Compatible controller: SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
  • [Individual specification]
  • Movement amount: 100mm
  • Table surface size: 100 x 100mm
  • Feed crew: Ball screw diameter φ8mm, Lead 2mm
  • Movement guide: Outer rail structure
  • Stage top side material: Aluminum
  • Surface treatment: Black anodic oxide
  • Mass: 3.2kg
  • Resolution (full): 4μm/Pulse
  • Resolution (half): 2μm/Pulse
  • Max speed: 30mm/sec
  • Positioning accuracy: 10μm
  • Repeatable positioning accuracy: 3μm
  • Withstand load: 117N (12.0kgf)
  • Moment rigidity/pitch: 0.23″/N・cm
  • Moment rigidity/yaw: 0.12″/N・cm
  • Moment rigidity/roll: 0.2″/N・cm
  • Lost motion: 3μm
  • Backlash: 3μm
  • Parallelism: 50μm
  • Running parallelism: 10μm
  • Pitching: 25″
  • Yawing: 20″
  • Sensor product number: Microphoto sensor: GP1S092HCPIF (Sharp Corporation)
  • Limit sensors: Is available (NORMAL CLOSE)
  • Origin sensor: Is available
  • Proximity origin sensor: Is available
  • Scale head: 0.5μm
  • CE conform product
  • RoHS conform product

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