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3-6946-01 Mass Flow Controller 10SLM Air C1020-4S2-10L-Air
model:
3-6946-01
category:
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Product Description
Product Model: 3-6946-01 Features Achieves high flow ra […]
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Product Details
Product Model: 3-6946-01
Features
- Achieves high flow rate precision without temperature correction circuit by adopting thermal flow sensor.
- Restricts flow surge phenomena at the time of start（interval of 30seconds or more is required）.
Spec
- Model number: C1020-4S2-10L-Air
- Flow rate (SLM): 10
- Gas: Air
- Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 - 35℃)
- Reproducibility: +/- 0.2% FS
- Flow rate control range: 5 - 100% FS
- Fluid: Gas
- Available temperature: 5 - 50℃ 85%RH or less
- Responsiveness: 6sec
- Operation pressure range: 50 - 300kPa
- Pressure resistance: 1MPa (G)
- External leak rate: 1 x 10 - 7Pa, m3/sec (He) or less
- Gas contact unit material: Stainless Steel (SUS316), PTFE, fluorine Rubber
- Surface treatment: Mechanical processing finish
- Fittings: Equivalent to 1/4in.SWL
- Input and output: Analog signal (0 - 5VDC)
- Valve type: N/O normal open
- Drive power: +15VDC +/- 5% 60mA, -15VDC +/- 5% 150mA
- Communication system: Analog 0 - 5VDC (D-Sub9Pin connector)
- Size: 160 x 33.6 x 105mm
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