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69-3849-30 Standard sensor for film thickness meter SL-A0E00
Product Description
Product Model: 69-3849-30Product Brand: INFICON Feature […]
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Product Details
Product Model: 69-3849-30
Product Brand: INFICON
Features
- Standard sensor for quartz film thickness meter
- Can be ***d with film thickness monitor STM-2
- Separate sensor, sensor feed-through, and crystal vibrator are required.
- Ultra-Torr specification allows variable sensor length
- water cooling required
Spec
- Sensor Feedthrough Connection: Ultra-Torr
- Sensor Length Adjustment Range: 20.3~71 cm
- Crystal Vibrator Size: Diameter 14 mm
- Quartz Vibrator Measurement Start Frequency: 6 MHz
- Number of sensors installed: 1
- Water cooling: water temperature 30°C or less, flow rate 150~200 sccm
- Size: 27 x 62 x 18 mm
- Product Warranty: 1 year from date of shipment
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