laboratoryinstruments
4-1528-01 Wafer Hot Chuck Φ4 Black alumite PH201S-04
Product Description
Product Model: 4-1528-01Product Brand: MSA FACTORY Feat […]
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Product Details
Product Model: 4-1528-01
Product Brand: MSA FACTORY
Features
- Uniformly heats ultra-thin workpieces such as wafers and glass substrates.
- The workpiece can be fixed by vacuum suction.
- Precise temperature control is possible with the attached temperature controller.
Spec
- Plate size: Φ4 inch
- Surface Treatment: Black alumite
-
- Chuckable Size: Φ2 to 4 in
- Temperature Control Range: R.T. to 200 ° C
- Temperature Accuracy: ± 1.5%
- Electric capacity: 400 W
- Size: 140 x 170 x 50.5 mm
- Weight: about 3 kg
-
- power supply: AC100V 50/60 Hz
- Size: 98 x 156 x 101 mm
- Weight: about 1.3 kg
- *Requires separate vacuum pumps (Recomm***ed pumps Example: 1 -9197 - 02 Diaphragm Dry vacuum pumps DAP -12 S).
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