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3-5559-01 Mass Flow Controller 10 - 20SCCM MC-10RC-4SWLR4A0A0-01
model:
3-5559-01
category:
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Product Description
Product Model: 3-5559-01 Features Gas type and flow rat […]
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Product Details
Product Model: 3-5559-01
Features
- Gas type and flow rate can be changed (VR function installed).
Spec
- Model number: MC-10RC-4SWLR4A0A0-01
- Specification: Equivalent to 6.35mmSWL
- Flow rate: 10 - 20SCCM
- Flow rate accuracy: +/- 1% F.S. (accuracy guaranteed range 15℃ - 35℃)
- Response speed: 1 seconds or less (T98)
- Flow rate control range: 2 - 100% F.S..
- Fittings: Equivalent to 1/4 (127mm face-to-face)
- Main unit size: 127.4 x 38 x 130mm
- *Please select flow rate range from flow rate code table to order.
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