Analyzer, Testing Equipment
61-6985-62 Vacuum Specification Automatic Rotation Stage VSGSP-60YAW
Product Description
Product Model: 61-6985-62Product Brand: SIGMAKOKI CO., […]
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Product Details
Product Model: 61-6985-62
Product Brand: SIGMAKOKI CO., LTD.
Features
- Automatic rotation stage for vacuum environment.
- The compact type that can save space of φ60 mm is ideal for *** in experiments and in the chamber of inspection equipment.
- φ120 mm is equipped with a limit sensor for vacuum environments.
- Although it is thin, it ***s a large motor of □ 42 mm, thereby achieving a high load capacity.
- A 1m Teflon coated cable is provided for direct connection from the vacuum motor and vacuum limit switch to the chamber connector.
Spec
-
[
Common specification]
- Motor type: VSGSP-60YAW: Vacuum specification 5 phase stepping motor 0.66A/phase (Tamagawa Seiki (Co., Ltd.)), VSGSP-120YAW: Vacuum Specification 5 phase stepping motor 0.75A/phase (Oriental Motor (Co., Ltd))
- Motor product number: VSGSP-60YAW: TS3664N5 (□24mm) , VSGSP-120YAW: PK543V-NB (□42mm)
- Motor step angle: 0.72°
- Sensor power voltage: VSGSP-60YAW: -, VSGSP-120YAW: DC5 - 24V
- Sensor power consumption: VSGSP-60YAW: -, VSGSP-120YAW: Consumption current 10mA (Max 20mA)
- Sensor control output: VSGSP-60YAW: Contact method, VSGSP-120YAW: Mechanical
- Sensor output logic: NORMAL OPEN
- Compatible driver: SG-5M, SG-55M, SG-514MSC, MC-7514PCL
- Compatible controller: GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
- [Individual specification]
- Rotation range: CW, CCW direction ∞
- Table surface size: φ60mm
- Moving mechanism: Worm worm wheel
- Movement guide: Bearing system
- Stage material: Aluminum
- Surface treatment: No
- Mass: 0.45kg
- Resolution/(full): 0.005°/Pulse
- Resolution (half): 0.0025°/Pulse
- Max speed: 20°/sec
- Repeat positioning accuracy: 0.02°
- Withstand load: 29.4N (3.0kgf)
- Lost motion: 0.05°
- Sensor type: No
- Limit sensors: No
- Origin sensor: No
- Proximity origin sensor: No
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