61-6985-62 Vacuum Specification Automatic Rotation Stage VSGSP-60YAW
Analyzer, Testing Equipment

61-6985-62 Vacuum Specification Automatic Rotation Stage VSGSP-60YAW

model: 61-6985-62
brand: SIGMAKOKI CO., LTD.

Product Description

Product Model: 61-6985-62Product Brand: SIGMAKOKI CO., […]

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Product Details

Product Model: 61-6985-62
Product Brand: SIGMAKOKI CO., LTD.

Features

  • Automatic rotation stage for vacuum environment.
  • The compact type that can save space of φ60 mm is ideal for *** in experiments and in the chamber of inspection equipment.
  • φ120 mm is equipped with a limit sensor for vacuum environments.
  • Although it is thin, it ***s a large motor of □ 42 mm, thereby achieving a high load capacity.
  • A 1m Teflon coated cable is provided for direct connection from the vacuum motor and vacuum limit switch to the chamber connector.

Spec

  • [

    Common specification]
  • Motor type: VSGSP-60YAW: Vacuum specification 5 phase stepping motor 0.66A/phase (Tamagawa Seiki (Co., Ltd.)), VSGSP-120YAW: Vacuum Specification 5 phase stepping motor 0.75A/phase (Oriental Motor (Co., Ltd))
  • Motor product number: VSGSP-60YAW: TS3664N5 (□24mm) , VSGSP-120YAW: PK543V-NB (□42mm)
  • Motor step angle: 0.72°
  • Sensor power voltage: VSGSP-60YAW: -, VSGSP-120YAW: DC5 - 24V
  • Sensor power consumption: VSGSP-60YAW: -, VSGSP-120YAW: Consumption current 10mA (Max 20mA)
  • Sensor control output: VSGSP-60YAW: Contact method, VSGSP-120YAW: Mechanical
  • Sensor output logic: NORMAL OPEN
  • Compatible driver: SG-5M, SG-55M, SG-514MSC, MC-7514PCL
  • Compatible controller: GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
  • [Individual specification]
  • Rotation range: CW, CCW direction ∞
  • Table surface size: φ60mm
  • Moving mechanism: Worm worm wheel
  • Movement guide: Bearing system
  • Stage material: Aluminum
  • Surface treatment: No
  • Mass: 0.45kg
  • Resolution/(full): 0.005°/Pulse
  • Resolution (half): 0.0025°/Pulse
  • Max speed: 20°/sec
  • Repeat positioning accuracy: 0.02°
  • Withstand load: 29.4N (3.0kgf)
  • Lost motion: 0.05°
  • Sensor type: No
  • Limit sensors: No
  • Origin sensor: No
  • Proximity origin sensor: No

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