Analyzer, Testing Equipment
61-6984-50 Precision Small ZF Axis Automated Stage Movement Amount 5mm 60 x 60mm OSMS60-5ZF
Product Description
Product Model: 61-6984-50Product Brand: SIGMAKOKI CO., […]
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Product Details
Product Model: 61-6984-50
Product Brand: SIGMAKOKI CO., LTD.
Features
- Z-axis stepping motor drive stage for measurement and inspection with high rigidity and accuracy.
- Stage planes that move up and down are horizontal, providing smooth movement.
- A compact horizontal Z-axis stage with a motor built into the main body by the company's unique space-saving design.
- Since the protrusion part is suppressed as much as possible, it is also ideal for the device integration application.
Spec
-
[
Common specification] - Motor type: 5 phase stepping motor 0.75A/phase (oriental motor (Co., Ltd)), OSMS40-5ZF is 035A/phase
- Motor product number: OSMS40-5ZF : PK513PA-C21 (□20mm) , OSMS60-5ZF/10ZF : PK523HPB-C12 (□28mm) , OSMS80-20ZF : A7177-90215KTG (□28mm)
- Motor step angle: 0.72 (OSMS80-20ZF is, 0.036°)
- Sensor power voltage: DC5 - 24V±10%
- Sensor power consumption: 40mA or less (20mA or less per 1 sensor)
- Sensor control output: NPN open collector output DC 30V or less 50mA or less
- Sensor output logic: When shading: Output transistor OFF (non-conducting)
- Compatible driver: OSMS40-5ZF : SG-5MA, SG-55MA, SG-514MSC, OSMS60-5ZF/10ZF : SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL, OSMS80-20ZF : SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
- Compatible controller: GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
- [Individual specification]
- Movement amount: 5mm
- Table surface size: 60 x 60mm
- Feed crew: Ball screw diameter φ6mm, Lead 1mm
- Movement guide: Outer rail structure
- Stage top side material: Aluminum
- Surface treatment: Black anodic oxide
- Mass: 0.6kg
- Resolution (full): 2μm/Pulse
- Resolution (half): 1μm/pulse
- Max speed: 4mm/sec
- Repeatable positioning accuracy: 10μm
- Withstand load: 39.2N (4.0kgf)
- Moment rigidity/pitch: 0.4″/N・cm
- Moment rigidity/yaw: 1″/N・cm
- Moment rigidity/roll: 1″/N・cm
- Lost motion: 5μm
- Parallelism: 50μm
- Running parallelism: 15μm
- Pitching: 20″
- Sensor product number: Micro photo sensor: GP1S097HCZ0F (Sharp Corporation): Limit sensor
- Limit sensors: Is available (NORMAL CLOSE)
- Origin sensor: No
- Proximity origin sensor: No
- CE conform product
- RoHS conform product
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