Analyzer, Testing Equipment
61-6983-54 Built-In Compact Scale Automated Stage 100 x 100mm OSMS(CS)26-100(X) OSMSCS26-100X
Product Description
Product Model: 61-6983-54Product Brand: SIGMAKOKI CO., […]
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Product Details
Product Model: 61-6983-54
Product Brand: SIGMAKOKI CO., LTD.
Features
- By using dedicated stage controllers (SHOT-302 GS/304 GS, HIT-M, HIT-S), a highly accurate and reliable full closed loop system can be realized.
- Structures resistant to moment and combined loads are less susceptible to pitching, rolling, and yawing, and can be positioned with high rigidity and accuracy.
- Although a compact scale is built in, the installation space does not change from the OSMS series when the same amount of movement is ***d.
Spec
-
[
Common specification]
- Motor type: 5 phase stepping motor 0.75A/phase (Oriental Motor (Co., Ltd))
- Motor product number: PK525HPB-C4 (□28mm)
- Motor step angle: 0.72°
- Sensor power voltage: DC5 - 24V±10%
- Sensor power consumption: 80mA or less (20mA or less per 1 sensor)
- Sensor control output: NPN open collector output DC 30V or less 50mA or less
- Sensor output logic: When shading: Output transistor OFF (non-conducting)
- Power voltage/Consumption current: DC5V±5％ / 50mA
- Drive cable: D15D15A-CA
- Scale cable: GSEF-CA-3
- Compatible driver: -
- Compatible controller: SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
- [Individual specification]
- Movement amount: 100mm
- Table surface size: 100 x 100mm
- Feed crew: Ball screw diameter φ8mm, Lead 2mm
- Movement guide: Outer rail structure
- Stage top side material: Aluminum
- Surface treatment: Black anodic oxide
- Mass: 3.2kg
- Resolution (full): 4μm/Pulse
- Resolution (half): 2μm/Pulse
- Max speed: 30mm/sec
- Positioning accuracy: 10μm
- Repeatable positioning accuracy: 3μm
- Withstand load: 117N (12.0kgf)
- Moment rigidity/pitch: 0.23″/N・cm
- Moment rigidity/yaw: 0.12″/N・cm
- Moment rigidity/roll: 0.2″/N・cm
- Lost motion: 3μm
- Backlash: 3μm
- Parallelism: 50μm
- Running parallelism: 10μm
- Pitching: 25″
- Yawing: 20″
- Sensor product number: Microphoto sensor: GP1S092HCPIF (Sharp Corporation)
- Limit sensors: Is available (NORMAL CLOSE)
- Origin sensor: Is available
- Proximity origin sensor: Is available
- Scale head: 0.5μm
- CE conform product
- RoHS conform product
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