Analyzer, Testing Equipment
61-6983-18 High Durability Type Automatic Alignment Stage Resolution Approximately 0.0053° HDS-60YAW
Product Description
Product Model: 61-6983-18Product Brand: SIGMAKOKI CO., […]
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Product Details
Product Model: 61-6983-18
Product Brand: SIGMAKOKI CO., LTD.
Features
- Automatic rotation stage for micro-angle adjustment ***d for alignment of semiconductor wafer markers, etc.
- Ideal for applications such as automatic alignment devices that adjust minute rotation angles for each sample.
- The *** of ball screws in the drive mechanism reduces wear and rattling of parts and achieves high durability.
- Since the linear motion of the ball screw is converted to the rotational motion by the steel belt, the resolution and rotational speed do not differ between the stroke center and the stroke ***.
- The HDS series origin sensor is located near the stroke center (0°).
- * Use the HDS series in a horizontal plane.
- * Performance cannot be guaranteed when the watch is mounted on a vertical surface or on an inverted surface.
Spec
-
[
Common specification]
- Motor type: HDS-60YAW: 5 phase stepping motor 0.66/phase (Tamagawa Seiki (Co., Ltd.)), HDS-80YAW, HDS-120YAW: 5 phase stepping motor 0.75A/phase (Oriental motor (Co., Ltd))
- Motor product number: HDS-60YAW: TS3664N4 (□24mm) , HDS-80YAW, HDS-120YAW: C9863-90215P (□28mm)
- Motor step angle: 0.72°
- Sensor power voltage: DC5 - 24V±10%
- Sensor power consumption: 60mA or less (20mA or less per 1 sensor)
- Sensor control output: NPN open collector output DC 30V or less 50mA or less
- Sensor output logic: When shading: Output transistor OFF (non-conducting): Limit sensor, When shading: Output transistor ON (conducting): Origin sensor
- Compatible driver: SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC
- Compatible controller: GSC-01, GIP-101, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
- [Individual specification]
- Rotation range: ±5°
- Table surface size: φ60mm
- Moving mechanism: Ball screw + steel belt
- Movement guide: Bearing system
- Stage top side material: Aluminum
- Surface treatment: Black anodic oxide
- Mass: 0.5kg
- Resolution (full): Approximately 0.0053°/Pulse
- Resolution (Half): Approximately 0.0027°/Pulse
- Max speed: 60°/sec
- Positioning accuracy: 0.05°
- Repeatable positioning accuracy: 0.003°
- Withstand load: 29.4N (3.0kgf)
- Moment stiffness: 1″/N・cm
- Lost motion: 0.003°
- Backlash: 0.05°
- Parallelism: 50μm
- Concentricity: 10μm (within a range of ±5°)
- Wobble: 0.01μm (within a range of ±5°)
- Sensor product number: Microphoto sensor: GP1S097HCZ (Sharp Corporation)
- Limit sensors: Is available (NORMAL CLOSE)
- Origin sensor: Is available (NORMAL OPEN)
- Proximity origin sensor: No
- CE conform product
- RoHS conform product
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