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3-6054-23 Ionizing Vacuum Meter ST200-ASWT-16ISG1
Product Description
Product Model: 3-6054-23Product Brand: ULVAC, Inc. Feat […]
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Product Details
Product Model: 3-6054-23
Product Brand: ULVAC, Inc.
Features
- Measurers of different measurement ranges can be connected: Multi-ion gauge allows selection of measurers according to application.
- Compact: Significantly smaller than previous models (56% reduction in controller volume), world's smallest class Usability: PC/smartphone connection enables setpoint setting, status checking, etc. Full lineup: In addition to analog output specifications (ST200-A) and serial communication specifications (ST200-R), EtherCAT specifications (ST200-E) will be added. - World's first triode metal ionization vacuum gauge (patent p***ing): Long life even in a difficult environment for vacuum gauges. - Filament life notification function: Filament power monitoring allows advance notification of filament life. - Wide range of pressure measurements: from atmospheric pressure to high vacuum area (1 x 10+5~1 x 10-5 Pa) (when optional unit SWU10-R is connected). - Accurate atmospheric pressure measurement: Confirmation of atmospheric pressure for chamber opening (when optional unit SAU is connected).
Spec
- Measuring range (Pa): 1.0 x 10 ^ - 5 ~ 1.0 x 10 ^ 1
- Mode: ST 200 -A stand-alone mode
- Number of pieces: 1
- External dimensions: ST 200 + measurer/69 x 63 x 120 mm, ISG 1/48 x 70 x 96 mm, SWU 10 - R + measurer/phi 40 x 81 mm, SAU + measurer/phi 30 x 67.5 mm
- Operating temperature range: ST 200 -A (10 ~ 50 degrees Celsius)
- Measured value output: Output voltage DC 0 ~ 10 V LOG output 0.75 V/1 digit
- Accuracy of measurement: 1.0 x 10 ^ - 4 ~ 3.0 x 10 + 0 Pa: +/- 10% (ST 200 -A single unit mode), 1.0 x 10 ^ - 4 ~ 1.0 x 10 + 4 Pa: +/- 10% 1.0 x 10 ^ 4 ~ 1.0 x 10 ^ 5 Pa: +/- 20% (ST 200 -A + SWU 10 - R combination mode), 1.0 x 10 ^ - 4 ~ 1.0 x 10 ^ 4 Pa: +/- 10% 1.0 x 10 ^ 4 ~ 3.0 x 10 ^ 5 Pa: +/- 3% F.S. (3.0 x 10 ^ 3 Pa, reference temperature 25 degrees C) (ST 200 -A + SWU 10 - R + SAU combination mode)
- Power supply voltage: 20 ~ 28 VDC (Ripple, Noise 1% or Less) 8 W or less
- SWT -16 (NW 16)/SWT -25 (NE 25): Ionizing vacuum measuring stator
- ISG1: Indicator
- SWU 10 - R: Pirani vacuum gauge with 0.5 m cable
- SWP -16 (NW 16): Pirani measurer
- SAU (NW 16): atmospheric pressure sensor with 0.5 m cable
- Display cable: 5 m (cable between display and main unit)
- AC adapter included
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