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3-5267-01 Turbo Molecular Vacum Pump Evacuation System VPT-060
Product Description
Product Model: 3-5267-01Product Brand: ULVAC, Inc. Feat […]
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Product Details
Product Model: 3-5267-01
Product Brand: ULVAC, Inc.
Features
- The necessary equipment is compactly arranged in the base frame, and it is suitable for a clean vacuum environment.
Spec
- Model number: VPT-060
- Size (mm): 340 x 340 x 355
- Weight (kg): 17
- Achieving pressure: 10^ - 5Pa range
- Main pump Turbo molecular pump (air-cooled) 60 L/sec
- Auxiliary pump: Diaphragm type dry vacuum pump 20L/min
- Required electric amount: Single phase 100V 0.3kVA
- Inlet port: ISO63
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