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4-4263-06 ［Discontinued］Mass Flow Controller (Economy Model) 10 SCCM He S48-32-HMTMFC-10SCCM-4IS-He
model:
4-4263-06
category:
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Product Description
Product Model: 4-4263-06 Features Accurate mass flow co […]
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Product Details
Product Model: 4-4263-06
Features
- Accurate mass flow control of gas is possible.
- It is equipped with highly reliable thermal sensors and solenoid valves.
- Fast response and flow rate setting within 2 seconds.
Spec
- Full scale flow rate/connection: 10 SCCM
- Connection diameter: 1/4 inchSW
- Measured gas species: He
- Number of pieces: 1
- Gas Contact Material: SUS 316 L, Viton, PTFE, Magnetic Stainless Steel
- Valve type: closed when not energized (closed): C
- Flow control range: 0 ~ 50 LM/2 ~ 100% FS, 100 LM to/5 ~ 100% FS
- Response speed: 0 ~ 50 LM/1 sec or less, 100 LM to/2 sec or less
- Flow rate accuracy: +/- 1.0% F.S. (15 degrees C to 35 degrees C)
- Repeatability: +/- 0.2% F.S. (15 degrees C to 35 degrees C)
- Voltage: 1 MPa (G)
- External leak rate: less than 1 x 10 -8 Pa m 3/s (He)
- Flow setting signal: 0.1 ~ 5 VDC
- Flow rate output signal: 0 -5 VDC
- Driving power: +/- 15 VDC
- Standard fittings: 0 ~ 50 LM/1/4 inch Swagelok equivalent area = 127 mm, 100 LM/200 LM/3/8 inch Swagelok equivalent area = 181 mm
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