3-766-01 Compact Mass Flow Controller MF-CP10N-500CCM
toner

3-766-01 Compact Mass Flow Controller MF-CP10N-500CCM

model: 3-766-01
category: toner

Product Description

Product Model: 3-766-01 Features Features include switc […]

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Product Details

Product Model: 3-766-01

Features

  • Features include switch output, automatic shutoff in case of emergency, and preset functions.
  • High-speed control within 0.5 seconds is possible.
  • It is equipped with flow control value and integration function.
  • Suitable for flow control of gas consumption and purge gas.
  • Small mass flow controllers require dedicated cables or dedicated adapters.

Spec

  • Flow rate range: 500 CCM
  • connection port diameter (mm) : φ6 (One-touch fitting made in Plastic)
  • Accuracy: ±3% F.S.
  • Gas material: Polyamide Plastic, fluorine rubber, stainless steel, alumina, semiconductor silicon solder
  • Size: 70 x 30 x 70mm
  • Applicable gas: N2/Air
  • Response speed: 0.5 sec or less
  • Power supply: DC24V ±10%

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