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61-9948-16 Small Handy Mass Flow Control Unit FLOW COMPO (TM) 3660MFC 10Sccm/Min FCC4000-3660-AIR-10SCCM-1/4SW-20
Product Description
Product Model: 61-9948-16Product Brand: KOJIMA INSTRUME […]
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Product Details
Product Model: 61-9948-16
Product Brand: KOJIMA INSTRUMENTS INC.
Features
- Compact handy mass flow control unit with built-in mass flow controller and lead-out unit.
- Touch panel type allows easy operation such as full scale setting, flow rate setting, valve opening and closing.
- If requested, it can be made for fluids other than AIR (N2, H2, He, Ar, O2, CO2, and other gases). Please consult me.
Spec
- Sensor: Thermal sensor
- Fluid: AIR (*Other N2, H2, He, Ar, O2, conforms to CO2, and various other gases. Contact us for any questions. )
- Full scale: 10sccm/min (20℃ 1atm volume flow rate display) (*0℃ calibration capable. Contact us for any questions. )
- Valve method: Proportional Solenoid Valve (closed when power off)
- Control/Measurement Range: 2 - 100%F.S
- Flow rate accuracy: ±1.0%F.S. (25℃)
- Pressure resistance: 980KPA(G)
- Gas contact unit material: Stainless Steel (SUS316), FKM
- Connection port size: 1/4 Swagelok (*For other fitting, consult with us. )
- Power supply: AC 85 - 264V 48 - 440Hz
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